Silicon Carbide Microelectromechanical Systems For Harsh Environments

Silicon Carbide Microelectromechanical Systems For Harsh Environments

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eBook

Razavy, Mohsen ; Cheung, Rebecca

World Scientific Publishing Company 2006

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Language

English

Publisher

World Scientific Publishing Company, 2006

ISBN

1-86094-624-0
9786611347567
1-281-34756-6
1-86094-909-6